Micro Electro Mechanical Systems (MEMS): A Ready Vision To Technology
Dr Gurudutt Sahni - Leader Valves Ltd (PB) - INDIA - [-]
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  • Abstract
    -Microelectromechanical systems (MEMS) are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices
    -MEMS devices refer to mechanical components on the micrometre size and include 3D lithographic features of various geometries These devices generally range in size from a micrometre (a millionth of a metre) to a millimetre (thousandth of a metre). At these size scales, a human's intuitive sense of physics do not always hold true .
    -MEMS augments this decision-making capability with "eyes" and "arms", to allow Microsystems to sense and control the environment. Sensors gather information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic phenomena. The electronics then process the information derived from the sensors and through some decision making capability direct the actuators to respond by moving, positioning, regulating, pumping, and filtering, thereby controlling the environment for some desired outcome or purpose. Because MEMS devices are manufactured using batch fabrication techniques similar to those used for integrated circuits, unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip at a relatively low cost.
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